JPH02108331U - - Google Patents
Info
- Publication number
- JPH02108331U JPH02108331U JP1723489U JP1723489U JPH02108331U JP H02108331 U JPH02108331 U JP H02108331U JP 1723489 U JP1723489 U JP 1723489U JP 1723489 U JP1723489 U JP 1723489U JP H02108331 U JPH02108331 U JP H02108331U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- recess
- holder body
- depth
- fixing means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1723489U JPH02108331U (en]) | 1989-02-15 | 1989-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1723489U JPH02108331U (en]) | 1989-02-15 | 1989-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108331U true JPH02108331U (en]) | 1990-08-29 |
Family
ID=31230836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1723489U Pending JPH02108331U (en]) | 1989-02-15 | 1989-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108331U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0373452U (en]) * | 1989-11-20 | 1991-07-24 | ||
| JP2009061568A (ja) * | 2007-09-10 | 2009-03-26 | Disco Abrasive Syst Ltd | 板状物加工用トレイおよび加工装置 |
-
1989
- 1989-02-15 JP JP1723489U patent/JPH02108331U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0373452U (en]) * | 1989-11-20 | 1991-07-24 | ||
| JP2009061568A (ja) * | 2007-09-10 | 2009-03-26 | Disco Abrasive Syst Ltd | 板状物加工用トレイおよび加工装置 |